Beilstein J. Nanotechnol.2013,4, 453–460, doi:10.3762/bjnano.4.53
crystals; helium ion microscopy; ion beam/solid interactions; vacanciesincrystals; Introduction
The helium ion microscope allows the projection of a He+ beam of several tens of kiloelectronvolts with a diameter of 0.4 nm [1] onto a sample. This makes HIM an attractive tool for surface patterning and
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Figure 1:
HIM SE image of a Au{111} surface, exposed to a He+ beam with a fluence of 8.4 × 1017 cm−2 at diffe...